Quartz boats are precision containers which are used extensively in a variety of industries, including semiconductors, photovoltaics, chemicals, and laboratories. They are employed for processes such as high-temperature treatment, chemical corrosion, and crystal growth. Quartz boats are irreplaceable in high-end manufacturing and scientific research due to their excellent high-temperature resistance, corrosion resistance, high purity and thermal stability. Quartz boats are available in a variety of styles, designs and classifications, depending on the specific requirements of the application.

1. The style classification of quartz boats

The design of quartz boats is primarily optimized based on their intended use, technical requirements and the shape of the loads they carry. The following are some of the most common styles of quartz boats:

Flat-bottomed quartz boat

(1) Characteristic: Its bottom is flat, allowing it to hold flat or block-shaped materials.

(2) Application: It is commonly used in the cleaning, etching and high-temperature annealing processes of semiconductor wafers.

(3) Advantage: Its simple structure makes it easy to clean and maintain.

V-shaped quartz boat

(1) Characteristic: The base of the quartz boat is designed in a V shape, making it suitable for loading long or cylindrical materials efficiently.

(2) Application: It is widely used in the processing and cleaning of silicon rods in the photovoltaic industry.

(3) Advantage: Its V-shaped base ensures a secure hold on the materials, thereby minimizing the risk of sliding and collision.

U-shaped quartz boat

(1) Characteristic: The bottom is U-shaped, suitable for loading small or granular materials.

(2) Application: It is often used for high-temperature treatment of laboratory chemical reagents or crystal growth.

(3) Advantage: The U-shaped design helps to evenly distribute heat and improve processing efficiency.

Multi-slot quartz boat

(1) Characteristic: The interior of the boat is designed with multiple slots, allowing for the simultaneous loading of multiple samples.

(2) Application: It is suitable for multi-batch processing of semiconductor wafers or multi-sample experiments in laboratories.

(3) Advantage: It can improve loading efficiency and reduce operation time.

Quartz boat with cover

(1) Characteristic: The boat is equipped with a quartz cover, which is able to seal the boat body.

(2) Application: It is used in high-temperature processes that require air isolation or atmosphere control.

(3) Advantage: It can prevent pollution and enhance process stability.

Tubular quartz boat

(1) Characteristic: The quartz boat features a tubular design and is commonly used in conjunction with quartz tubes.

(2) Application: It is used for high-temperature treatment in tube furnaces or chemical vapor deposition (CVD) processes.

(3) Advantage: It is perfectly matched with quartz tubes and suitable for continuous production.

2. The selection and application of quartz boat

(1) In semiconductor industry, typically, high-purity or synthetic quartz material flat-bottomed or multi-slot quartz boats are selected to ensure high purity and precision

(2) In Photovoltaic industry, V-shaped or U-shaped quartz boats made of high-purity quartz material are typically used to meet the processing requirements of silicon rods or silicon wafers.

(3) In laboratory research, customized quartz boats made of ordinary or high-purity quartz material should be selected in accordance with the specific experimental requirements and to meet the unique experimental conditions.